Products for Semiconductor and Solar Energy Applications
Quartz Glass Tube Heaters
< Outline >
It has been estimated that a metal contamination in a quartz bath of
wet processing system for semiconductor manufacturing process can
cost several hundred thousand dollars when damages to wafers in the
course of wet processing, quartz bath, pumps in the plumbing,filters valves,
fittings, pipes, etc. are taken into account in addition to the cost of downtime.
Quartz heaters and halogen lamp heaters help reduce such risks. .
< Quarts Heaters >
1. Quartz heaters maintain clean operation with their high purity level and
run free of metal contamination risk. With their heat resistivity reaching
1000 degrees (C) they provide the highest heat output and operating
temperature.
2. Double tubed heaters protect against initial contamination in the event of
outer tube damage such as pinholes by additional shielding with the
inner tube.
With a crack sensor, it enables excess heat buildup and allows abnormality
signal output.
3. For applications where the chemical resistance of quartz glass is high and
expected damage potential is low, single tube models are also available for
high cost to performance ratio.
< Halogen Lamp Heaters >
1. Thanks to the high transparency level of quartz glass which enables
high efficiency light trans-illumination, halogen lamp heaters provide
rapid heat buildup and cooling via infrared light heat exchange.
Moreover, the surface temperature of quartz glass remains low,
thus minimizing etching and bubbling which result from excess
temperature differential with etching chemicals.
2. Because the heating is from infrared trans-illumination, it is possible to
design for indirect heating without lamp immersion into the bath,
thus making it totally free of becoming a contamination risk.
We welcome all inquiries including point of use space utility,
application, initial proposal and design.